Design and Optimization of a Low Power Pressure Sensor for Wireless Biomedical Applications

<div>Sensitivity map of 1000 × 1000 × 10 <i>μ</i>m diaphragm using XFAB XC10 technology [<a href="/journals/js/2015/352036/#B17">17</a>] and normalized resistance values for <svg height="12.3916pt" id="M76" style="vertical-align:-3.42948pt" version="1.1" viewbox="-0.0498162 -8.96212 28.6589 12.3916" width="28.6589pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M542 242C542 369 469 429 379 468C370 472 372 496 376 513L416 681L400 691L344 648L219 51C167 69 113 128 113 217C113 324 166 387 266 428L252 459C124 418 23 336 23 202C23 95 90 13 205 -8L182 -132C165 -222 191 -254 209 -261L215 -258L270 -7C415 -4 542 98 542 242ZM469 232C469 126 403 33 279 39L355 409C399 394 469 331 469 232Z" id="g113-243"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="565" vert-adv-y="565"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,10.978,0)"><path d="M535 323V373H52V323H535ZM535 138V188H52V138H535Z" id="g117-34"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="587" vert-adv-y="587"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,22.241,0)"><path d="M241 635C89 635 35 457 35 312C35 153 89 -12 240 -12C390 -12 443 166 443 312C443 466 390 635 241 635ZM238 602C329 602 354 454 354 312C354 172 330 22 240 22C152 22 124 173 124 313S148 602 238 602Z" id="g113-49"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="480" vert-adv-y="480"></glyph.data></g></svg>.</div>

Journal of Sensors

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Figure 6

Figure 6: Design and Optimization of a Low Power Pressure Sensor for Wireless Biomedical Applications 