Review Article
A Review on Key Issues and Challenges in Devices Level MEMS Testing
Table 4
MEMS electrical failures.
| | Electric short and open circuit |
| | Failure | Oxidation | Electromigration | ESD, high electric field | Dielectric material degradation | | Causes | Environmental | Mismatch load | Excessive load | Capacitive discharges |
| | Contamination |
| | Failure | Usage environment | Intrinsic (crystal growth) | Manufacturing-induced | | | Causes | Low and high temperature and humidity | Environmental | Rough handling in industry | |
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