In₂O₃- and SnO₂-Based Thin Film Ozone Sensors: Fundamentals

Figure 14

1: Influence of photon energy on the response of In₂O₃-based RT ozone sensors. 2: spectral characteristics of GaInN QW LED. The layer is irradiated by UV light in vacuum, followed by an oxidation to the original state by means of exposure to O₃. Adapted with permission from [177]. Copyright 2010 Wiley-VCH.