In₂O₃- and SnO₂-Based Thin Film Ozone Sensors: Fundamentals

Figure 17

Maximum and minimum conductivities of films prepared at different substrate temperatures during photoreduction/reoxidation process. Films were deposited by DC-magnetron sputtering. Photoreduction was carried out in vacuum using UV Hg lamp. Adapted with permission from [173]. Copyright 2001 American Institute of Physics.