In<sub>2</sub>O<sub>3</sub>- and SnO<sub>2</sub>-Based Thin Film Ozone Sensors: Fundamentals

<div>Sensitivity of a 100 nm thick <svg height="12.0575pt" id="M130" style="vertical-align:-3.2911pt" version="1.1" viewbox="-0.0498162 -8.7664 26.921 12.0575" width="26.921pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M303 0V28C221 34 213 39 213 125V525C213 610 221 616 303 622V650H38V622C120 616 128 610 128 525V125C128 40 120 34 38 28V0H303Z" id="g121-71"></path><glyph.data ascent="989" descent="-360" horiz-adv-x="341" vert-adv-y="341"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,4.224,0)"><path d="M524 0V26C466 32 460 36 460 104V297C460 393 411 449 331 449C302 449 276 437 248 419C223 402 201 387 181 372V451C137 432 90 420 42 411V388C96 378 102 374 102 310V104C102 38 97 33 29 26V0H246V26C187 32 181 36 181 104V339C211 365 250 390 290 390C357 390 381 345 381 276V109C381 40 374 32 315 26V0H524Z" id="g121-108"></path><glyph.data ascent="989" descent="-360" horiz-adv-x="547" vert-adv-y="547"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,11.335,0)"><path d="M381 665C170 665 44 498 44 318C44 125 188 -15 369 -15C552 -15 703 117 703 333C703 534 550 665 381 665ZM359 629C491 629 601 517 601 306C601 114 502 21 390 21C249 21 146 158 146 346S248 629 359 629Z" id="g121-77"></path><glyph.data ascent="989" descent="-360" horiz-adv-x="747" vert-adv-y="747"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,21.126,3.132)"><path d="M545 403C545 425 527 451 498 451C448 451 400 404 312 286L290 341C262 412 246 451 219 451C182 451 138 404 92 345L112 323C152 368 169 378 181 378C192 378 201 359 216 321L257 214C184 115 142 69 113 69C102 69 93 73 88 79S78 89 68 89C47 89 24 61 24 40C24 8 49 -12 75 -12C125 -12 175 31 271 175L312 64C330 15 357 -12 382 -12C421 -12 475 35 515 98L496 121C466 88 439 62 420 62C402 62 384 92 363 147L325 247C349 280 374 309 397 333C422 361 446 381 462 381C471 381 481 374 488 366C493 360 499 357 505 357C521 357 545 380 545 403Z" id="g50-121"></path><glyph.data ascent="3443" descent="-2856" horiz-adv-x="569" vert-adv-y="569"></glyph.data></g></svg> film versus operation temperature. Films were deposited by DC-magnetron sputtering. Photoreduction was carried out in vacuum using UV Hg lamp. Adapted with permission from [<a href="/journals/js/2016/3816094/#B170">170</a>]. Copyright 2001 Wiley-VCH.</div>

Journal of Sensors

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Figure 18

Figure 18: In<sub>2</sub>O<sub>3</sub>- and SnO<sub>2</sub>-Based Thin Film Ozone Sensors: Fundamentals 

Journal of Sensors

In2O3- and SnO2-Based Thin Film Ozone Sensors: Fundamentals

Figure 18

In₂O₃- and SnO₂-Based Thin Film Ozone Sensors: Fundamentals