Review Article

In2O3- and SnO2-Based Thin Film Ozone Sensors: Fundamentals

Table 1

Comparison of main types of sensors, which can be used for ozone detection.

Type of sensorsDetection limit, ppbAdvantagesDisadvantages

Optical:
UV absorbance
UV-LIDAR technique

1–30
20–200
Absolute measurements; reliability; RT operation; good selectivity; high accuracy; quick response; high resolution, high measuring range; long life time; acceptable for stationary instrumentsNeed UV source; interference from some organics and mercury; rather large size; fairly expensive per unit. This makes it very difficult if not impossible to design cheap portable device for in situ monitoring, in real-time distribution of ozone concentrations within large geographic areas

Optochemical:
chemiluminescence, fluorescence

7–10
High sensitivity; RT operationNeed fuel and light source; fairly expensive per unit; the broadband character of luminescence spectra as well as the ubiquitous presence of naturally fluorescent compounds leads luminescence sensors to suffer from a critical lack of selectivity; sensitive to temperature fluctuations and other environmental factors that quench fluorescence

Electrochemical50–100 Low-power consumption; RT operation; response is relatively quick; high accuracy; monitoring is continuous; high sensitivity; inexpensive and compact device acceptable for portable and fixed instrumentsLess selective than optical technologies; sensitive to toxic gases and oxygen; have limitations in conditions of exploitation (temperature, pressure, and humidity); short life time at high concentration of ozone; drift is possible; need calibration; not fail-safe

Chemical:
chemical titration, diffusive and pumped ozone badges

20–200
Inexpensive; simple; easy to use; RT operation Low sensitivity; it is not selective; it is not a continuous monitoring process; tapes have limited life span and must be stored properly in control conditions

Polymer-based >1000Small size; RT operation; low consumable power; good sensitivity; acceptable for portable instrumentsCommonly not selective; some polymers react strongly to water vapor; degradation under UV irradiation and ozone influence; drift is possible; need regular calibration

Conductometric
metal oxide (MeOx) heated
5–10 High sensitivity to ozone; fast response; low-cost; robust; small size; wide operating temperature range; resistant to corrosive environments; long operating life; compact and durable; acceptable for portable instrumentsCommonly not selective; drift of operating characteristics is possible; need regular calibration; nonlinear response; need oxygen; high enough power consumption; not fail-safe