Review Article
In2O3- and SnO2-Based Thin Film Ozone Sensors: Fundamentals
Table 2
Conductometric-type ozone sensors and sensing materials used for their design.
| | Sensor type or principle of operation | , °C | Sensing materials |
| | Pseudo-Schottky diode | RT–100 | Pd (15 nm)/Ge (20 nm)/Pd (45 nm) on the p-type InP | | Conductometric MeOx (heated) | 200–400 | In2O3; WO3; SnO2; ZnO; MoO3-In2O3; In2O3-ZnO-SnO2; ITO; NiO; SmFeO3; Ga2O3/In2O3 | | RT conductometric MeOx | RT | CuCrO2; CuAlO2; In2O3:ZnO:SnO2; SnO2-In2O3 | Conductometric MeOx
(UV photoreduction/reoxidation) | RT | In2O3; ZnO; Pt/TiO2-SnO2 | Conductometric MeOx
(UV assistance) | RT | In2O3; SnO2/SWNTs | | Conductometric (polymer-based) | RT–150 | Copper phthalocyanine (CuPc); polypyrrole (PPy); InAcAc | | Conductometric (I-D structures) | RT–300 | Carbon nanotubes network; In2O3; ZnO; SnO2 |
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