MEMS Technology Sensors as a More Advantageous Technique for Measuring Foot Plantar Pressure and Balance in Humans

Table 1

Technical specifications of some existing sensors and 2 different MEMS proposals [12].

	Teksan	Novel	Parotec	MEMS [4]	Sensors 1 and 3 MPX2202A [13]	Sensors 2 and 4 MPX5999D [14]
Sensor size	0.15 mm thick	1.9 mm thick	4 cm^2	2 mm thick	5.08–5.59 mm thick	5.08–5.59 mm thick
Number of sensors	960	99	24	15	1	1
Range (kPa)	1034	1200	625	3000	200	1000
Frequency (Hz)	500	Not specified	250	200	Not specified	Not specified
Hysteresis	24%	<7%	0.05% at 20 Ncm^−1	Negligible	0.1%	Accuracy of 2.5% taking into account linearity, temperature and pressure hysteresis, offset and span