Modeling and Finite Element Analysis Simulation of MEMS Based Acetone Vapor Sensor for Noninvasive Screening of Diabetes

<div>CoventorWare results showing resonance frequencies for the gap distances (a) 8 <i>μ</i>m, (b) 9 <i>μ</i>m, (c) 10 <i>μ</i>m, and (d) 11 <i>μ</i>m.</div>

Journal of Sensors

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Figure 10

Figure 10: Modeling and Finite Element Analysis Simulation of MEMS Based Acetone Vapor Sensor for Noninvasive Screening of Diabetes 