Modeling and Finite Element Analysis Simulation of MEMS Based Acetone Vapor Sensor for Noninvasive Screening of Diabetes

Figure 11

Modeled and simulated displacements for the gap distances (a) 5 μm, (b) 6 μm, (c) 7 μm, and (d) 8 μm.

(a)

(b)

(c)

(d)