Modeling and Finite Element Analysis Simulation of MEMS Based Acetone Vapor Sensor for Noninvasive Screening of Diabetes

Table 1

Sensors for acetone vapor detection.

The sensor	Working principle	Detection limit (ppm)	Working temperature (°C)
Zinc oxide (ZnO) [41]	Resistance change	1000	325
Ferroelectric tungsten trioxide (-WO3) [9]	Resistance change	0.20	500
Si-doped epsilon-WO3 [42]	Resistance change	0.02	350
Indium nitride (InN) catalyzed with Pt [7]	Current change	0.4	200
Tin oxide (SnO2) nanotubes functionalized with Pt and Au [15]	Resistance change	0.10	350
Single-crystalline indium oxide (In2O3) nanowires [43]	Resistance change	25	400
Tin oxide (SnO2) fibers catalyzed with Pt [17]	Resistance change	0.12	300
Nanostructured anatase of titanium oxide (TiO2) [44]	Resistance change	1	500
Pt-functionalized tungsten oxide (WO3) [4]	Resistance change	0.12	300
Sr-doped lanthanum orthoferrite (LaFeO3) [16]	Resistance change	500	275
Tungsten trioxide (WO3) nanofibers functionalized by Rh2O3 nanoparticles [13]	Resistance change	0.10	350
Ferroelectric tungsten trioxide (ɛ-WO3) doped with Cr [12]	Resistance change	0.20	400
Ni-doped zinc oxide (ZnO) nanorods [14]	Resistance change	100	Room temperature
The proposed MEMS sensor	Frequency/amplitude change	0.4	Room temperature