Modeling and Finite Element Analysis Simulation of MEMS Based Acetone Vapor Sensor for Noninvasive Screening of Diabetes

<table class="table-group" id="tab2"><tr><td><table class="table"><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr class="thead"><td class="align_left">Layer</td><td class="align_center">Young’s modulus (GPa)</td><td class="align_center">Density (kg/m<sup>3</sup>)</td></tr><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr><td class="align_left">Substrate (silicon 100)</td><td class="align_center">169</td><td class="align_center">2330</td></tr><tr><td class="align_left">Structure material (SiO<sub>2</sub>)</td><td class="align_center">73</td><td class="align_center">2300</td></tr><tr><td class="align_left">Structure material (aluminum)</td><td class="align_center">70</td><td class="align_center">2700</td></tr><tr class="table-tr"><td colspan="3"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Young’s modulus and densities of the CMOS layers.

Journal of Sensors

tab2

Table 2

Table 2: Modeling and Finite Element Analysis Simulation of MEMS Based Acetone Vapor Sensor for Noninvasive Screening of Diabetes 