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Journal of Sensors
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2016
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Article
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Tab 2
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Research Article
Modeling and Finite Element Analysis Simulation of MEMS Based Acetone Vapor Sensor for Noninvasive Screening of Diabetes
Table 2
Young’s modulus and densities of the CMOS layers.
Layer
Young’s modulus (GPa)
Density (kg/m
3
)
Substrate (silicon 100)
169
2330
Structure material (SiO
2
)
73
2300
Structure material (aluminum)
70
2700