Research Article
Modeling and Finite Element Analysis Simulation of MEMS Based Acetone Vapor Sensor for Noninvasive Screening of Diabetes
Table 3
Modeled and simulated damped natural frequencies.
| | Gap distance (µm) | Modeled frequency (kHz) | Simulated frequency (kHz) | Error% |
| | 7 | 23.901 | 25.168 | 5.302 | | 8 | 26.050 | 25.296 | 2.893 | | 9 | 26.889 | 25.857 | 3.839 | | 10 | 27.264 | 25.915 | 4.951 | | 11 | 27.448 | 26.475 | 3.54 |
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