Plasma-Treated CVD Graphene Gas Sensor Performance in Environmental Condition: The Role of Defects on Sensitivity

<div>SEM images of CVD graphene as grown on Cu (a) and after transferred onto <svg height="12.4698pt" id="M4" style="vertical-align:-3.18147pt" version="1.1" viewbox="-0.0498162 -9.28833 40.0036 12.4698" width="40.0036pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M449 634C442 637 425 643 405 650C376 660 341 666 307 666C181 666 98 590 98 485C98 400 170 343 215 310L246 288C307 243 343 204 343 147C343 67 291 18 219 18C104 18 61 124 51 202L23 199C28 124 27 71 27 47C47 22 122 -16 204 -16C324 -16 428 60 428 174C428 256 379 309 307 360L276 382C223 419 179 455 179 516C179 576 221 632 293 632C379 632 410 564 418 487L448 490C446 536 446 592 449 634Z"></path></g><g transform="matrix(.013,0,0,-0.013,6.528,0)"><path d="M244 607C244 633 228 655 200 655C166 655 146 618 146 594C146 564 166 546 191 546C221 546 244 574 244 607ZM222 91L209 114C184 94 148 66 133 66C127 66 124 73 130 96L201 370C213 416 211 448 191 448C162 448 88 407 29 352L42 328C73 354 104 371 114 371C120 371 119 365 115 345L53 92C32 5 45 -12 68 -12C103 -12 186 50 222 91Z"></path></g><g transform="matrix(.013,0,0,-0.013,10.338,0)"><path d="M699 369C699 549 575 666 407 666C186 666 23 488 23 278C23 101 145 -16 312 -16C535 -16 699 153 699 369ZM600 373C600 210 500 19 321 19C186 19 120 129 120 272C120 450 232 631 399 631C541 631 600 522 600 373Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,19.399,3.132)"><path d="M414 144C384 79 371 75 317 75H135L276 221C367 316 408 376 408 465C408 570 327 635 237 635C179 635 131 609 100 575L42 494L67 471C94 510 138 565 205 565C277 565 321 517 321 435C321 348 258 270 195 195C146 137 88 81 33 26V0H411C423 44 433 88 446 135L414 144Z"></path></g><g transform="matrix(.013,0,0,-0.013,24.345,0)"><path d="M368 703H309L44 -163H104L368 703Z"></path></g><g transform="matrix(.013,0,0,-0.013,29.706,0)"><path d="M449 634C442 637 425 643 405 650C376 660 341 666 307 666C181 666 98 590 98 485C98 400 170 343 215 310L246 288C307 243 343 204 343 147C343 67 291 18 219 18C104 18 61 124 51 202L23 199C28 124 27 71 27 47C47 22 122 -16 204 -16C324 -16 428 60 428 174C428 256 379 309 307 360L276 382C223 419 179 455 179 516C179 576 221 632 293 632C379 632 410 564 418 487L448 490C446 536 446 592 449 634Z"></path></g><g transform="matrix(.013,0,0,-0.013,36.234,0)"><path d="M244 607C244 633 228 655 200 655C166 655 146 618 146 594C146 564 166 546 191 546C221 546 244 574 244 607ZM222 91L209 114C184 94 148 66 133 66C127 66 124 73 130 96L201 370C213 416 211 448 191 448C162 448 88 407 29 352L42 328C73 354 104 371 114 371C120 371 119 365 115 345L53 92C32 5 45 -12 68 -12C103 -12 186 50 222 91Z"></path></g></svg> (b). (c-e) Details of the interdigitated chemiresistor; (d) I/V graphic. Distance between fingers is 60 microns.</div>

Journal of Sensors

fig1

Figure 1

Figure 1: Plasma-Treated CVD Graphene Gas Sensor Performance in Environmental Condition: The Role of Defects on Sensitivity 