Miniature All-Silica Microbubble-Based Fiber Optic Fabry-Perot Pressure Sensor with Pressure Leading-In Tube

<div>The pressure sensitivity as functions of the structural parameters of microbubble. (a) The radius (<span class="nowrap"><svg height="6.1673pt" id="M18" style="vertical-align:-0.2063904pt" version="1.1" viewbox="-0.0498162 -5.96091 5.60619 6.1673" width="5.60619pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M393 379C402 394 400 411 393 422C384 437 365 448 348 448C301 448 237 372 186 285H182L193 335C210 408 205 448 178 448C150 448 80 402 29 344L45 321C80 355 114 373 122 373C128 373 130 365 124 330C106 228 76 98 50 -5L57 -12C82 -5 112 3 132 6L172 203C196 256 234 304 254 329C275 355 293 367 306 367C318 367 330 360 342 348C347 343 355 343 365 350S386 367 393 379Z"></path></g></svg>)</span> and (b) the thickness (<span class="nowrap"><svg height="9.49473pt" id="M19" style="vertical-align:-0.2063999pt" version="1.1" viewbox="-0.0498162 -9.28833 6.83278 9.49473" width="6.83278pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M499 88L487 113C459 86 422 65 413 65C403 65 403 74 409 98L461 318C487 426 460 448 431 448C408 448 383 441 352 424C305 398 223 344 157 257H155L243 674C249 702 249 712 240 712C227 712 170 680 87 673L82 648H117C155 648 162 644 150 590L23 -4L30 -12C55 -4 81 3 105 8C113 53 131 150 143 187C199 281 323 387 372 387C390 387 393 369 380 311L328 86C313 19 319 -12 347 -12C379 -12 442 24 499 88Z"></path></g></svg>)</span> of the microbubble.</div>

Journal of Sensors

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Figure 2

Figure 2: Miniature All-Silica Microbubble-Based Fiber Optic Fabry-Perot Pressure Sensor with Pressure Leading-In Tube 