Miniature All-Silica Microbubble-Based Fiber Optic Fabry-Perot Pressure Sensor with Pressure Leading-In Tube

Figure 3

Fabrication process of the microbubble fiber optic Fabry-Perot pressure sensor. (a) Inserting and fusing the HST #1 into HST #2; (b) fusing the one end of the well-cut HST #1; (c) fabricating a microbubble at the end of well-cut HST #1; (d) inserting and fusing the SMF into the HST #3; (e) inserting and fusing HST #2 and HST #3 into the HST #4 from opposite ends.

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