Design and Evaluation of a Multidirectional Thermal Flow Sensor on Flexible Substrate

Figure 5

Normalized heater resistance (black square symbol) and upstream-downstream thermistors’ normalized differential resistance (red circle symbol) response to flow pulses: (a) 10, (b) 15, (c) 20, and (d) 25 SLPM flow.

(a)

(b)

(c)

(d)