Design and Evaluation of a Multidirectional Thermal Flow Sensor on Flexible Substrate

Table 2

2D sensor review.

Flow range	Sensitivity	Static response time	Power consumption (mW)	2D accuracy	Reference
≤20 m/s	0.07 V/(m/s)	16 ms	—	—	[15]
0.025–0.2 m/s	30 mV/(m/s)	—	4	—	[16]
5–10 m/s	4.4 mV/(m/s)	A few seconds	50	5°	[17]
-0.4–0.4 SLPM	0.19 V W^-1 m^-1 s	10 ms	5.95	1.7°	[18]
-0.2–0.2 SLPM	1.9 V W^-1 m^-1 s	—	5	3.1°
≤25 m/s	—	—	400		[19]
≤2 m/s	33.33 V/W/(m/s)	—	4	5°	[20]
≤5 m/s	12.99 V/W/(m/s)	10 ms	0.177	3.5°	[21]
0.2–9 m/s	1.2 V^2/(m/s)^0.5	<15 ms	160	0.96°	[28]
0-25 SLPM	12.6 mW/(m/s) (CT)	0.8 s (CC mode)	CC mode: 120	2.7°	This work
	-2.80 mW/(m/s) (CC)