Research Article
Design and Evaluation of a Multidirectional Thermal Flow Sensor on Flexible Substrate
| Flow range | Sensitivity | Static response time | Power consumption (mW) | 2D accuracy | Reference |
| ≤20 m/s | 0.07 V/(m/s) | 16 ms | — | — | [15] | 0.025–0.2 m/s | 30 mV/(m/s) | — | 4 | — | [16] | 5–10 m/s | 4.4 mV/(m/s) | A few seconds | 50 | 5° | [17] | -0.4–0.4 SLPM | 0.19 V W-1 m-1 s | 10 ms | 5.95 | 1.7° | [18] | -0.2–0.2 SLPM | 1.9 V W-1 m-1 s | — | 5 | 3.1° | ≤25 m/s | — | — | 400 | | [19] | ≤2 m/s | 33.33 V/W/(m/s) | — | 4 | 5° | [20] | ≤5 m/s | 12.99 V/W/(m/s) | 10 ms | 0.177 | 3.5° | [21] | 0.2–9 m/s | 1.2 V2/(m/s)0.5 | <15 ms | 160 | 0.96° | [28] | 0-25 SLPM | 12.6 mW/(m/s) (CT) | 0.8 s (CC mode) | CC mode: 120 | 2.7° | This work | -2.80 mW/(m/s) (CC) |
|
|