Research Article
Influence of the Crystal Texture on Raman Spectroscopy of the AlN Films Prepared by Pulse Laser Deposition
Figure 3
The (002) plane -scan rocking curves for AlN films prepared at laser energy density of (a) 1.3 J/cm2, (b) 2.4 J/cm2, (c) 3.5 J/cm2, and (d) 4.8 J/cm2.
