Super-Resolution Raman Spectroscopy by Digital Image Processing

<table>The stress dependences on (a) <svg height="15.5375" id="M28" style="vertical-align:-3.27605pt" version="1.1" viewbox="0 0 31.012501 15.5375" width="31.012501" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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l-31 22q-32 23 -53.5 41.5t-45 57t-23.5 77.5q0 82 58 132.5t156 50.5q46 0 101 -17l18.5 -6t17 -6t8.5 -3q-4 -55 0 -147z" id="x1D446"></path></g>
<g transform="matrix(.012,-0,0,-.012,8.225,15.475)"><path d="M493 503l-29 -4q-13 56 -28 80q-13 22 -35.5 29.5t-78.5 7.5h-76q-22 0 -27.5 -5t-5.5 -27v-238h103q66 0 82.5 12t25.5 62h29v-193h-29q-9 54 -25.5 67t-82.5 13h-103v-181q0 -64 15 -78.5t84 -19.5v-28h-272v28q61 5 74.5 19.5t13.5 78.5v399q0 64 -13 78t-72 19v28
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t-52 18.5v23q79 14 139 41v-81q3 2 29 20.5t44 29.5q45 28 81 28t66 -22t46 -61q25 20 83 57q39 26 76 26q59 0 93 -40t34 -113v-193q0 -49 10.5 -60.5t54.5 -16.5v-26z" id="x6D"></path></g>
</svg> of the film stress, (b) <svg height="16.3125" id="M29" style="vertical-align:-3.27605pt" version="1.1" viewbox="0 0 31.625 16.3125" width="31.625" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,12.162)"><path d="M499 88q-41 -46 -83.5 -73t-68.5 -27q-41 0 -19 98l52 225q10 43 8 59.5t-16 16.5q-37 0 -112 -65t-117 -135q-14 -42 -38 -179q-36 -7 -75 -20l-7 8l127 594q8 40 2.5 49t-35.5 9h-35l5 25q36 3 71.5 13t56.5 18t25 8q11 0 3 -38l-88 -417h2q77 102 195 167q44 24 79 24
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<g transform="matrix(.012,-0,0,-.012,8.837,16.25)"><path d="M493 503l-29 -4q-13 56 -28 80q-13 22 -35.5 29.5t-78.5 7.5h-76q-22 0 -27.5 -5t-5.5 -27v-238h103q66 0 82.5 12t25.5 62h29v-193h-29q-9 54 -25.5 67t-82.5 13h-103v-181q0 -64 15 -78.5t84 -19.5v-28h-272v28q61 5 74.5 19.5t13.5 78.5v399q0 64 -13 78t-72 19v28
h440q1 -40 10 -147z" id="x46"></path></g><g transform="matrix(.012,-0,0,-.012,14.942,16.25)"><path d="M135 536q-20 0 -35 15.5t-15 35.5q0 22 15 37t36 15t35.5 -15t14.5 -37q0 -21 -15 -36t-36 -15zM252 0h-220v26q48 5 59 17t11 63v206q0 47 -9 58t-54 18v24q78 12 142 39v-345q0 -51 11.5 -63t59.5 -17v-26z" id="x69"></path></g><g transform="matrix(.012,-0,0,-.012,18.178,16.25)"><path d="M238 0h-223v26q48 5 60 17t12 61v473q0 50 -10.5 60.5t-58.5 15.5v24q73 8 148 35v-608q0 -49 11.5 -61t60.5 -17v-26z" id="x6C"></path></g><g transform="matrix(.012,-0,0,-.012,21.188,16.25)"><path d="M797 0h-214v26q46 5 58 17.5t12 63.5v167q0 116 -88 116q-48 0 -112 -52q3 -18 3 -42v-195q0 -46 11 -58t53 -17v-26h-214v26q48 5 59.5 17t11.5 60v172q0 115 -88 115q-47 0 -109 -52v-235q0 -47 10 -59.5t48 -17.5v-26h-211v26q50 5 62.5 17t12.5 60v207q0 48 -9 59.5
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</svg> of the film thickness, (c) <svg height="8.4250002" id="M30" style="vertical-align:-0.273pt" version="1.1" viewbox="0 0 8.5874996 8.4250002" width="8.5874996" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,8.013)"><path d="M475 445l-64 -69q-119 -128 -289 -280q27 6 81 -15q66 -26 102 -26q48 0 111 93l23 -19q-41 -84 -75.5 -116.5t-73.5 -32.5q-37 0 -147 53q-43 21 -63 7q-22 -15 -38 -41q-4 -7 -11 -7q-8 10 -8 26q0 38 47 83l292 273q-32 -5 -67 -1q-63 7 -105 7q-32 0 -53.5 -22
t-47.5 -67l-25 13q15 39 38 78q40 66 83 66q57 0 120 -12q52 -10 80 -10q29 0 67 42z" id="x1D467"></path></g>
</svg> of the detection depth, and (d) <svg height="12.4375" id="M31" style="vertical-align:-0.1638pt" version="1.1" viewbox="0 0 8.1000004 12.4375" width="8.1000004" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,12.162)"><path d="M452 333q0 -82 -46 -164t-116 -128q-81 -53 -158 -53q-26 0 -51 13t-37 32q-26 41 -6 134l91 431q7 40 2.5 47t-34.5 7h-33l2 25q36 4 72.5 13t58.5 15.5t28 6.5q10 0 4 -29l-91 -391h2q65 77 130 116.5t105 39.5q36 0 56.5 -32t20.5 -83zM365 316q0 76 -35 76
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</svg> of the beam spot size. </table>

Journal of Spectroscopy

Super-Resolution Raman Spectroscopy by Digital Image Processing

Figure 3