Copyright © 2009 Hassen M. Ouakad and Mohammad I. Younis. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

1. E. M. Abdel-Rahman, M. I. Younis, and A. H. Nayfeh, “Characterization of the mechanical behavior of an electrically actuated microbeam,” Journal of Micromechanics and Microengineering, vol. 12, no. 6, pp. 759–766, 2002. View at Publisher · View at Google Scholar
2. H. A. C. Tilmans and R. Legtenberg, “Electrostatically driven vacuum-encapsulated polysilicon resonators—part II: theory and performance,” Sensors and Actuators A, vol. 45, no. 1, pp. 67–84, 1994.
3. Y. Zhang and Y.-P. Zhao, “Static study of cantilever beam stiction under electrostatic force influence,” Acta Mechanica Solida Sinica, vol. 17, no. 2, pp. 104–112, 2004. View at Publisher · View at Google Scholar
4. R. Maboudian and R. T. Howe, “Critical review: adhesion in surface micromechanical structures,” Journal of Vacuum Science and Technology B, vol. 15, no. 1, pp. 1–20, 1997.
5. T. Lam and R. B. Darling, “Physical modeling of MEMS cantilever beams and the measurement of stiction force,” Journal of Modeling and Simulation of Microsystems, vol. 4, pp. 418–421, 2001.
6. T. Yu, R. Ranganathan, N. Johnson, N. Yadav, R. Gale, and T. Dallas, “In situ characterization of induced stiction in a MEMS,” Journal of Microelectromechanical Systems, vol. 16, no. 2, pp. 355–364, 2007. View at Publisher · View at Google Scholar
7. Z. C. Leseman, S. P. Carlson, and T. J. Mackin, “Experimental measurements of the strain energy release rate for stiction-failed microcantilevers using a single-cantilever beam peel test,” Journal of Microelectromechanical Systems, vol. 16, no. 1, pp. 38–43, 2007. View at Publisher · View at Google Scholar
8. W. M. Van Spengen, R. Puers, and I. De Wolf, “The prediction of suction failures in MEMS,” IEEE Transactions on Device and Materials Reliability, vol. 3, no. 4, pp. 167–172, 2003. View at Publisher · View at Google Scholar
9. A. A. Savkar, K. D. Murphy, Z. C. Leseman, T. J. Mackin, and M. R. Begley, “On the use of structural vibrations to release stiction failed MEMS,” Journal of Microelectromechanical Systems, vol. 16, no. 1, pp. 163–173, 2007. View at Publisher · View at Google Scholar
10. L. L. Mercado, S.-M. Kuo, T.-Y. T. Lee, and L. Liu, “A mechanical approach to overcome RF MEMS switch stiction problem,” in Proceedings of Electronic Components and Technology Conference, pp. 377–384, 2003.
11. L. L. Mercado, S.-M. Kuo, T.-Y. T. Lee, and L. Liu, “Mechanics-based solutions to RF MEMS switch stiction problem,” IEEE Transactions on Components and Packaging Technologies, vol. 27, no. 3, pp. 560–567, 2004. View at Publisher · View at Google Scholar
12. C. H. Mastrangelo, “Suppression of stiction in MEMS,” Center for Integrated Microsystems, Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, Mich, USA, pp. 1–12.
13. O. Raccurt, F. Tardif, F. A. D'Avitaya, and T. Vareine, “Influence of liquid surface tension on stiction of SOI MEMS,” Journal of Micromechanics and Microengineering, vol. 14, no. 7, pp. 1083–1090, 2004. View at Publisher · View at Google Scholar
14. E. E. Jones, K. D. Murphy, and M. R. Begley, “Mechanical measurements of adhesion in microcantilevers: transitions in geometry and cyclic energy changes,” Experimental Mechanics, vol. 43, no. 3, pp. 280–288, 2003.
15. J. A. Knapp and M. P. De Boer, “Mechanics of microcantilever beams subject to combined electrostatic and adhesive forces,” Journal of Microelectromechanical Systems, vol. 11, no. 6, pp. 754–764, 2002. View at Publisher · View at Google Scholar
16. S. Gorthi, A. Mohanty, and A. Chatterjee, “Cantilever beam electrostatic MEMS actuators beyond pull-in,” Journal of Micromechanics and Microengineering, vol. 16, no. 9, pp. 1800–1810, 2006. View at Publisher · View at Google Scholar
17. M. P. de Boer, P. J. Clews, B. K. Smith, and T. A. Michalske, “Adhesion of polysilicon microbeams in controlled humidity ambients,” in Proceedings of the Materials Research Society Symposium, vol. 518, pp. 131–136, San Francisco, Calif, USA, April 1998.
18. M. P. de Boer and T. A. Michalske, “Accurate method for determining adhesion of cantilever beams,” Journal of Applied Physics, vol. 86, no. 2, pp. 817–827, 1999.
19. C. H. Mastrangelo and C. H. Hsu, “Mechanical stability and adhesion of microstructures under capillary forces—part I: basic theory,” Journal of Microelectromechanical Systems, vol. 2, no. 1, pp. 33–43, 1993. View at Publisher · View at Google Scholar
20. C. H. Mastrangelo and C. H. Hsu, “Mechanical stability and adhesion of microstructures under capillary forces—part II: experiments,” Journal of Microelectromechanical Systems, vol. 2, no. 1, pp. 44–55, 1993. View at Publisher · View at Google Scholar
21. R. Legtenberg, H. A. C. Tilmans, J. Elders, and M. Elwenspoek, “Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms,” Sensors and Actuators A, vol. 43, no. 1–3, pp. 230–238, 1994.
22. N. Tas, T. Sonnenberg, H. Jansen, R. Legtenberg, and M. Elwenspoek, “Stiction in surface micromachining,” Journal of Micromechanics and Microengineering, vol. 6, no. 4, pp. 385–397, 1996.
23. M. I. Younis, E. M. Abdel-Rahman, and A. Nayfeh, “A reduced-order model for electrically actuated microbeam-based MEMS,” Journal of Microelectromechanical Systems, vol. 12, no. 5, pp. 672–680, 2003. View at Publisher · View at Google Scholar
24. A. H. Nayfeh, M. I. Younis, and E. M. Abdel-Rahman, “Reduced-order models for MEMS applications,” Nonlinear Dynamics, vol. 41, no. 1–3, pp. 211–236, 2005. View at Publisher · View at Google Scholar · View at Zentralblatt MATH · View at MathSciNet
25. P. Lambert, Capillary Forces in Microassembly: Modeling, Simulation, Experiments, and Case Study, Springer, New York, NY, USA, 2007.
26. M. R. M. Crespo da Silva and C. C. Glynn, “Non-linear flexural-flexural-torsional dynamics of inextensional beams—I: equations of motion,” Journal of Structural Mechanics, vol. 6, no. 4, pp. 437–448, 1978.
27. A. H. Nayfeh and P. F. Pai, Linear and Nonlinear Structural Mechanics, Wiley Series in Nonlinear Science, John Wiley & Sons, Hoboken, NJ, USA, 2004. View at MathSciNet