]>A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping : Figure 2
586718.fig.002a
(a) 3-D view of the microplate
586718.fig.002b
(b) Side view of the microplate
Figure 2: A schematic drawing of a torsion microplate under the effect of squeeze film damping.