Enhancing the Long-Term Yield Competitiveness of a Semiconductor Manufacturing Factory Using a Multiobjective Fuzzy Nonlinear Programming Approach

Table 1

The replacement mechanism.

If	Then	So
^1∑𝛼=0𝐶^′𝐿(𝑙)(𝛼)+𝐶^′𝑅(𝑙)(𝛼)21<0	𝑃(𝑙)−0.5≤0	𝑃(𝑙)=0
^1∑𝛼=0𝐶^′𝐿(𝑙)(𝛼)+𝐶^′𝑅(𝑙)(𝛼)21=0	No restriction on 𝑃(𝑙)−0.5	𝑃(𝑙)=0 or 1
^1∑𝛼=0𝐶^′𝐿(𝑙)(𝛼)+𝐶^′𝑅(𝑙)(𝛼)21>0	𝑃(𝑙)−0.5≥0	𝑃(𝑙)=1