Adaptive PI-Based Sliding Mode Control for Nanopositioning of Piezoelectric Actuators

Figure 2

Simulation responses to step signals with amplitudes of (a) 1 𝜇m; (b) 2 𝜇m; (c) 3 𝜇m; and (d) 4 𝜇m.

(a)

(b)

(c)

(d)