Adaptive PI-Based Sliding Mode Control for Nanopositioning of Piezoelectric Actuators

Table 3

Control performance in step tracking.

Performance	SMC				APISMC
(with different amplitudes)	1 𝜇m	2 𝜇m	3 𝜇m	4 𝜇m	1 𝜇m	2 𝜇m	3 𝜇m	4 𝜇m
1% settling time (ms)	2.92	3.00	3.20	3.40	0.70	0.80	0.90	1.00
Overshoot	0	0	0	0	13.09%	6.84%	3.85%	2.72%