Adaptive PI-Based Sliding Mode Control for Nanopositioning of Piezoelectric Actuators

Table 4

Performance of the controllers with sinusoidal signal.

Performance	SMC		APISMC
(with different frequencies)	RMSE (𝜇m)	Max.E (𝜇m)	RMSE (𝜇m)	Max.E (𝜇m)
5 (HZ)	9.7542×10^−7	−0.0038	4.8415×10^−9	9.7061×10^−5
10 (HZ)	1.3951×10^−6	0.0043	1.8005×10^−8	1.9198×10^−4
20 (HZ)	6.3364×10^−6	0.0069	1.5046×10^−7	5.5204×10^−4
50 (HZ)	1.7269×10^−4	0.0230	4.3371×10^−6	0.0029
100 (HZ)	0.0021	0.0690	5.2509×10^−5	0.0103