On Synergistic Integration of Adaptive Dithering Based Internal Model Control for Hysteresis Compensation in Piezoactuated Nanopositioner

Figure 20

Multiamplitude, multifrequency tracking results of FFT ADC system: (a) tracking error, (b) zoomed version of desired versus actual position, and (c) input versus output plot.

(a)

(b)

(c)