On Synergistic Integration of Adaptive Dithering Based Internal Model Control for Hysteresis Compensation in Piezoactuated Nanopositioner

Figure 21

Circular contouring results with an input rate of 0.25 Hz and different amplitudes and the biaxial inputs differing by (a and b) phase angle of 45° and (c and d) phase angle of 90°.

(a)

(b)

(c)

(d)