Research Article
On Synergistic Integration of Adaptive Dithering Based Internal Model Control for Hysteresis Compensation in Piezoactuated Nanopositioner
Table 3
Performance comparison of different control paradigms.
| Type of control | RMS error (in nm) | % error reduction |
| Undithered system | 37.311 | 0 | Unadaptive best voltage dithered | 35.83 | 3.969 | Unadaptive best displacement dithered | 31.42 | 15.788 | Unadaptive best combined dithered | 30.918 | 17.134 | FFT adaptive dither control | 30.541 | 18.144 | FFT + IMC adaptive dither control | 29.261 | 21.575 |
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