On Synergistic Integration of Adaptive Dithering Based Internal Model Control for Hysteresis Compensation in Piezoactuated Nanopositioner

Table 3

Performance comparison of different control paradigms.

Type of control	RMS error (in nm)	% error reduction
Undithered system	37.311	0
Unadaptive best voltage dithered	35.83	3.969
Unadaptive best displacement dithered	31.42	15.788
Unadaptive best combined dithered	30.918	17.134
FFT adaptive dither control	30.541	18.144
FFT + IMC adaptive dither control	29.261	21.575