On Synergistic Integration of Adaptive Dithering Based Internal Model Control for Hysteresis Compensation in Piezoactuated Nanopositioner

Table 7

Variation of tracking error with addition of process noise (at input).

Noise	FF + FB	FFT + IMC
	29.856 nm	31.723 nm
	36.812 nm	31.097 nm
	30.818 nm	31.687 nm
	37.692 nm	31.875 nm
	38.082 nm	30.604 nm
	37.733 nm	29.871 nm
	36.707 nm	30.32 nm
Variation range	7.877 nm	2.004 nm