On Synergistic Integration of Adaptive Dithering Based Internal Model Control for Hysteresis Compensation in Piezoactuated Nanopositioner

Table 8

Variation of tracking error with addition of measurement noise (sensor noise).

Noise	FF + FB	FFT + IMC
	37.052 nm	30.199 nm
	36.706 nm	30.235 nm
	37.913 nm	30.026 nm
	37.689 nm	30.163 nm
	36.753 nm	30.028 nm
Variation range	1.207 nm	0.209 nm