Clustering Ensemble for Identifying Defective Wafer Bin Map in Semiconductor Manufacturing

Table 4

Results of clustering methods by SSE.

Methods		Noise degree
		0.02	0.04	0.06	0.08	0.10
Hsu and Chien [8]		1184	1192	1203	1248	1322
Individual clustering	KB	2889	3092	3003	4083	3570
	KC	3331	2490	2603	3169	2603
	PB	5893	3601	6566	5839	6308
	PC	4627	4873	3330	3787	6112
Clustering ensemble	KB and PB	1827	1280	1324	1801	2142
	KC and PC	2272	2363	2400	1509	1718
	KB and PC	1368	1459	2400	1509	2597
	KC and PB	2100	2048	1421	1928	2043
	KB and PB and KC and PC	1586	1550	1541	1571	1860