Research Article
Clustering Ensemble for Identifying Defective Wafer Bin Map in Semiconductor Manufacturing
Table 5
Results of clustering methods by specificity.
| Methods | Noise degree | ā | ā | 0.02 | 0.04 | 0.06 | 0.08 | 0.10 |
| Hsu and Chien [8] | 0.4 | 0.4 | 0.4 | 0.4 | 0.4 |
| Individual clustering | KB | 1.0 | 1.0 | 1.0 | 1.0 | 1.0 | KC | 1.0 | 1.0 | 1.0 | 1.0 | 1.0 | PB | 1.0 | 1.0 | 1.0 | 1.0 | 1.0 | PC | 1.0 | 1.0 | 1.0 | 1.0 | 1.0 |
| Clustering ensemble | KB and PB | 0.7 | 0.5 | 0.5 | 0.5 | 0.8 | KC and PC | 0.5 | 0.8 | 0.9 | 0.8 | 0.6 | KB and PC | 0.5 | 0.7 | 0.9 | 0.8 | 0.7 | KC and PB | 0.9 | 0.5 | 0.5 | 0.6 | 0.7 | KB and PB and KC and PC | 1.0 | 0.9 | 0.9 | 0.9 | 1.0 |
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