Clustering Ensemble for Identifying Defective Wafer Bin Map in Semiconductor Manufacturing

Table 5

Results of clustering methods by specificity.

Methods		Noise degree
		0.02	0.04	0.06	0.08	0.10
Hsu and Chien [8]		0.4	0.4	0.4	0.4	0.4
Individual clustering	KB	1.0	1.0	1.0	1.0	1.0
	KC	1.0	1.0	1.0	1.0	1.0
	PB	1.0	1.0	1.0	1.0	1.0
	PC	1.0	1.0	1.0	1.0	1.0
Clustering ensemble	KB and PB	0.7	0.5	0.5	0.5	0.8
	KC and PC	0.5	0.8	0.9	0.8	0.6
	KB and PC	0.5	0.7	0.9	0.8	0.7
	KC and PB	0.9	0.5	0.5	0.6	0.7
	KB and PB and KC and PC	1.0	0.9	0.9	0.9	1.0