Research Article
Clustering Ensemble for Identifying Defective Wafer Bin Map in Semiconductor Manufacturing
Table 7
Clustering result on the index of recall.
| | | | Hsu and Chien [8] | Clustering ensemble | | | | KB and PB | KC and PC | KB and PC | KC and PB | KB and PB and KC and PC |
| | Recall | A | 1.00 | 1.00 | 1.00 | 0.93 | 1.00 | 1.00 | | B | 1.00 | 0.97 | 0.7 | 0.78 | 0.83 | 1.00 | | C | 1.00 | 0.94 | 0.67 | 0.84 | 0.67 | 0.97 | | D | 1.00 | 0.81 | 1.00 | 1.00 | 1.00 | 1.00 | | E | 1.00 | 0.79 | 1.00 | 1.00 | 1.00 | 1.00 | | F | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | | Avg. | 1.00 | 0.92 | 0.90 | 0.93 | 0.92 | 1.00 |
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