Research Article

Global Quantitative Sensitivity Analysis and Compensation of Geometric Errors of CNC Machine Tool

Table 3

The stand deviation of compensation values of individual geometric error.

Error termUnitStand deviation

10−4⋅rad
10−4⋅rad
10−4⋅rad
μm
μm
μm
10−4⋅rad
10−4⋅rad
10−4⋅rad
μm
μm
μm
10−4⋅rad
10−4⋅rad
10−4⋅rad
μm
μm
μm
10−4⋅rad
10−4⋅rad
10−4⋅rad