Evaluation of the Thickness in Nanolayers Using the Transfer Matrix Method for Modeling the Spectral Reflectivity : Table 1

]>Evaluation of the Thickness in Nanolayers Using the Transfer Matrix Method for Modeling the Spectral Reflectivity : Table 1

Table 1: Thickness evaluation using ellipsometry, RBS, TEM, and reflectivity spectra (present work) techniques.

Reflectivity; ^**Ellipsometry; ^†TEM; ^‡RBS.