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Figure 1: Plasma immersion ion implantation chamber with attached chemical chamber for posttreatment of polymer sample after PIII treatment. The sample is treated in “plasma chamber” by plasma and ion beam, which is extracted from plasma under high voltage. The high energy ions are bombarding the sample through the mesh. After treatment, the sample is moving with the arm manipulator into “chemical chamber,” where the top manipulator grabs the sample and put to the bath with solution. The manipulator with bath can be replaced with ATR crystal when FTIR ATR spectra of PIII-treated sample can be recorded under vacuum. All manipulations can be done under vacuum or inert gas.