Local Fatigue Evaluation in PZT Thin Films with Nanoparticles by Piezoresponse Force Microscopy
Figure 2
Local (upper) and macroscopic (lower) piezoloops obtained in different PZT films of different fatigue cycles. (a) PZT-BT5 thin film, (b) PZT-BT1 film, and (c) PZT film. Inset in (c) shows variation of the piezoloops with electric cycles in PZT sample which is annealed in nitrogen at 600°C for 30 minutes.
