Epitaxial Piezoelectric Pb(Zr_0.2Ti_0.8)O₃ Thin Films on Silicon for Energy Harvesting Devices

Figure 4

(a) Topography scan on a 20 × 20 μm² area, (b) V-PFM and (c) L-PFM: phase response of the vertical and lateral PFM measurements on the same area and schematic of the corresponding detected domains.

(a)

(b)

(c)