Piezoelectric Energy Harvesting Devices: An Alternative Energy Source for Wireless Sensors

Table 8

Summary of piezoelectric MEMS energy harvesting devices.

MEMS device description	Design/dimensions	Resonant frequency	Power output/voltage (reported)	Ref
AIN and PZT MEMS devices.	Piezoelectric generator located on top of a beam, piezoelectric layer sandwiched between top and bottom electrodes	300; 700 and 1000 Hz	1–100 μW	[68]
Energy harvesting MEMS device based on thin film PZT cantilevers,	Cantilever size: length = 13.5 mm, width = 9 mm, thickness = 192 μm	3 modes: 13.9; 21.9 and 48.5 kHz	2.4 V with 5.2 MΩ load, 1.01 μW	[69]
PZT-based MEMS with interdigital electrodes	Cantilever size: length = 3.000 μm, width = 1.500 μm, thickness = 22 μm	570–575 Hz	1.127 𝑉p-p,; 0.123 μW	[70]
PZT harvesters and MEMS technology	Device packaged using two wafers	1.8 kHz	40 μW	[71]
Thin film PZT-based MEMS power generator array for vibration energy harvesting, operating in d31 mode	Cantilever size: 2.000–3.500 μm, width = 750–1.000 μm	226–234 Hz	3.98 μW; 3.93 V	[72]
Thick film PZT free standing energy harvester operating in d31 mode	Cantilever size: length = 13.5 mm, width = 9 mm, thickness = 192 μm	229 Hz	270 nW at 9.81 m/s^2; 130 V	[73]
Two layered PMNZT bender devices for micropower generation	Cantilever size: length = 10 mm, width = 10 mm	120 Hz	2.0 𝑉p-p; 0.5 mW	[74]
Laser machined piezoelectric cantilever devices for energy harvesting	10 cantilevers on both sides of ridge, 5 of them are placed with tip mass alternately:length = 5.74 mm, width = 4 mm	870 Hz	1.13 μW at 870 Hz through 288.5 kΩ, power density of 301.3 μW/cm^3	[75]
Multilayer unimorph PZT cantilever with micromachined Si proof mass based on SOI	Device volume (mass and beam)~0.7690 mm^3	183.8 Hz	0.32 μW with 16.0 kΩ load; power density of 416 μW/cm^3	[76]
High performance MEMS PZT thin film energy harvester based on d33 mode	800 × 100 μm^2 cantilever with 10 μm thickness, proof mass of 1000 × 1000 × 500 μm^3	528 Hz	1.1 μW with 2.2 MΩ load; 4.4 𝑉p-p operating at vibration of 0.39 g. Power density 2.8 mWcm^-3g^−1	[77]
Piezoelectric energy harvesters based on Aluminum nitride (AIN)	Cantilever devices: length = 1.31 mm–2.10 mm, width = 3.0 mm–7.0 mm	200–1200 Hz	60 μW at 572 Hz, 2 g vibration level.	[78]