Multilayer Inorganic Electrets with and Layers for Applications on Heated Machinery
Figure 10
Dependence of in-plane retrapping of charge in OSRN electret. The initially trapped charge (RT) slowly decreases in the middle of the sample during 10 min anneal at different temperatures, but effectively moves in direction of sample edges. This in-plane mobility of charge located in Si3N4 electret close to the SiO2/Si3N4 interface completely discharges the sample in less than 16 hrs anneal at 450°C. Shown are the surface potential over the sample (a) and the step of potential in detail (b).
