Multilayer Inorganic Electrets with and Layers for Applications on Heated Machinery
Figure 12
The untrapping of negative charge stored near the SiO2/Si3N4 interface in ON-2 electret near the sample edges. The fabricated sample was charged (1), and sequentially annealed for 10 min at temperatures of 200, 350, 400, and 450°C, (2) to (5), respectively, followed by its anneal at a temperature of 450°C for 16 hrs (6), 40 hrs (7), and 110 hrs (8). The sample is 2 cm wide.
