Study on Effect of Ultrasonic Vibration on Grinding Force and Surface Quality in Ultrasonic Assisted Micro End Grinding of Silica Glass

Figure 10

Surface machined at (a) 𝐴=0 μm, 𝑎_𝑝=2 μm, 𝑓_𝑤=100 μm, 𝑛=18000 r/min; (b) 𝐴=6.5 μm, 𝑎_𝑝=2 μm, 𝑓_𝑤=100 μm, 𝑛=18000 r/min; (c) 𝐴=7.5 μm, 𝑎_𝑝=2 μm, 𝑓_𝑤=100 μm, 𝑛=18000 r/min; (d) 𝐴=8.5 μm, 𝑎_𝑝=2 μm, 𝑓_𝑤=100 μm, 𝑛=18000 r/min; (e) 𝐴=8.5 μm, 𝑎_𝑝=1 μm, 𝑓_𝑤=100 μm, 𝑛=18000 r/min; (f) 𝐴=8.5 μm, 𝑎_𝑝=2 μm, 𝑓_𝑤=100 μm, 𝑛=27000 r/min.

(a)  

(b)

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(e)

(f)