Dynamic Characteristics of Electrostatically Actuated Shape Optimized Variable Geometry Microbeam

Figure 16

Electric field distribution and the corresponding contour of electric potential: (a) electric field distribution of prismatic beam; (b) electric field distribution of variable geometry microbeam; (c) contour of electric potential of prismatic beam; (d) contour of electric potential of variable geometry microbeam.

(a)

(b)

(c)

(d)