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Shock and Vibration
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Shock and Vibration
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2015
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Article
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Fig 3
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Research Article
Dynamic Characteristics of Electrostatically Actuated Shape Optimized Variable Geometry Microbeam
Figure 3
Deformation of the optimized microbeam: (a) S1–S3; (b) S4–S6; (c) S7–S9.
(a)
(b)
(c)