Dynamic Characteristics of Electrostatically Actuated Shape Optimized Variable Geometry Microbeam

Table 1

Comparison of pull-in parameters of three available data sets.

Case	Microbeam parameters					Pull-in parameters				Relative error (%)
						Travel range		Voltage (V)
					(GPa),	Present work	Reference	Present work	Reference	Pull-in travel range	Pull-in voltage
	(m)
1	250	50	3	1	169, 0.06	0.4028	0.40 (Joglekar and Pawaskar 2012) [13]	39.59	39.50 (Osterberg and Senturia 1997) [4]	0.70	0.23
2	350	50	3	1	169, 0.06	0.4028	0.40 (Joglekar and Pawaskar 2012) [13]	20.20	20.20 (Osterberg and Senturia 1997) [4]	0.70	0
3	510	100	1.5	1.18	166, 0.06	0.424	0.428 (Nayfeh et al. 2007) [19]	4.82	4.8 (Nayfeh et al. 2007) [19]	−0.93	0.42